Ion Implantation in Semiconductors, Silicon and Germanium

by James W. Mayer

First published 1970

Cover of Ion Implantation in Semiconductors, Silicon and Germanium

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Catalogue record

Academic Press · 280 pages

Publisher: Academic Press
Pages: 280
ISBN: 978-0-12-480850-8

Full recordClose

Publisher: Academic Press
Pages: 280
ISBN: 978-0-12-480850-8
Author: Mayer, James W.
Statement: Ion Implantation in Semiconductors, Silicon and Germanium / James W. Mayer.
Records: Open Library

Subjects

Ion implantation
Semiconductors
Ion bombardment